|
| |
PB6-2P-CP |
PB8-2P-CP |
PB12-2P-CP |
PB6-8P |
PB8-4P |
| Capacity |
2 cassettes
of up to 6" wafers |
2 cassettes
of up to 8"
wafers |
2 cassettes
of up to
12" wafers |
8 cassettes
of up to 6"
wafers |
4 cassettes
of up to 8"
wafers |
| Max Heat Up Rate |
18°C/min |
15°C/min |
10°C/min |
3-4°C/min |
3-4°C/min |
| Max Cool Down Rate |
7°C/min |
6°C/min |
4-5°C/min |
3-4°C/min |
3-4°C/min |
| Temperature Range |
Ambient to
450°C
|
| Uniformity |
±2°C |
±2.5°C |
±3.5°C |
±6°C |
±8°C |
| Interior Chamber Dimensions |
10.75" I.D. (barrel) x 7.5"H x
16"D |
14.4" I.D. (barrel)x 9.9" H x
25.7"D |
21" I.D. (barrel)x
14" H x 26"D |
16.5" W x 18.2" H x 16.0"D |
20.25"W x 23.9"H x
12.0"D |
| Chamber Working Area |
1 compartment
6.4"W x 6.6"H x
14.24"D |
1 compartment
9.4"W x 9.0"H x
18.1"D |
1 compartment
15.1"W x
13.6"H x 19.2"D |
4 compartment
8.0"W x 7.8"H x
14.5"D |
4 compartment
10.0"W x 10.58"H x
10.58"D |
| Chamber Material |
316 L Stainless
Steel |
| Overall Oven Dimension |
20.5"W x 23.5"H x 37.0"D |
25.5"W x 26.5"H x 37.0"D |
|
24.5"W x 31.0"H x 33.0"D |
32.5"W x 42.0"H x
32.0"D |
| Controller Dimensions |
20.5"W x 6.5"H x
19.0"D |
| Shipping Weights crated |
450 lbs. |
550 lbs. |
550 lbs. |
780 lbs. (282 kg) |
760 lbs. (275 kg) |
| Facilities Oven and Controller |
220V, 1 phase, 3 wire, 35
amps |
220V, 1 phase, 3 wire, 35
amps |
208V, 3 phase, 4 wire, 30
amps |
| Vacuum Pump |
208V, 3 phase, 4 wire, 6.8
amps |
| Individual temperature rates may vary
dependent upon customer facilities and processes run. Please consult our
field service department for rate improvement
suggestions. |
