Polyimide Bake Oven
                                                               Product Specification Chart
  PB6-2P-CP PB8-2P-CP PB12-2P-CP PB6-8P PB8-4P
Capacity 2 cassettes
of up to 6" wafers
2 cassettes
of up to 8" wafers
2 cassettes
of up to 12" wafers
8 cassettes
of up to 6" wafers
4 cassettes
of up to 8" wafers
Max Heat Up Rate 18C/min 15C/min 10C/min 3-4C/min 3-4C/min
Max Cool Down Rate 7C/min 6C/min 4-5C/min 3-4C/min 3-4C/min
Temperature Range

                                                 Ambient to 450C

Uniformity 2C 2.5C 3.5C 6C 8C
Interior Chamber Dimensions 10.75" I.D. (barrel) x 7.5"H x 16"D 14.4" I.D. (barrel)x 9.9" H x 25.7"D 21" I.D. (barrel)x   14" H x 26"D 16.5" W x 18.2" H x 16.0"D 20.25"W x 23.9"H x 12.0"D
Chamber Working Area 1 compartment
6.4"W x 6.6"H x 14.24"D
1 compartment
9.4"W x 9.0"H x 18.1"D
1 compartment
15.1"W x 13.6"H x 19.2"D
4 compartment
8.0"W x 7.8"H x 14.5"D
4 compartment
10.0"W x 10.58"H x 10.58"D
Chamber Material                                                    316 L Stainless Steel
Overall Oven Dimension 20.5"W x 23.5"H x 37.0"D 25.5"W x 26.5"H x 37.0"D   24.5"W x 31.0"H x 33.0"D 32.5"W x 42.0"H x 32.0"D
Controller Dimensions                                                     20.5"W x 6.5"H x 19.0"D
Shipping Weights crated 450 lbs. 550 lbs. 550 lbs. 780 lbs. (282 kg) 760 lbs. (275 kg)
Facilities Oven and Controller 220V, 1 phase, 3 wire, 35 amps 220V, 1 phase, 3 wire, 35 amps 208V, 3 phase, 4 wire, 30 amps
Vacuum Pump                                               208V, 3 phase, 4 wire, 6.8 amps
Individual temperature rates may vary dependent upon customer facilities and processes run. Please consult our field service department for rate improvement suggestions.
Send mail to with questions or comments about this web site.
Last modified: 2019-05-31