environmentally friendly alternatives to equipment or procedures in current
use that are environmentally damaging. In this respect, plasma has directly
replaced wet chemical procedure. (with their associated toxic effluents) in
a range of technologies. YES-Glen Plasma Systems are easy to use,
inexpensive to operate and have no associated "clean-up" costs. Yield
Engineering Systems provides a complete line of plasma equipment to cover a
complete gamut of cleaning applications. These range from the demanding
needs of the semiconductor industry, (where substrates must be cleaned in
electron-free plasma to avoid damaging sensitive electronic components), to
the more robust needs of industries where plasma is used to improve bond
strengths in a diversity of products. Thousands of plasma systems are in
daily use worldwide.
Slide-in 16x16-inch Electrodes/ Sample shelves allow the system to be operated with any
combination of electrode/shelf pairs. For high throughput applications, a maximum of six
electrode/shelf combinations may be used in the Active or RIE plasma modes for a total
sample capacity of 1,536 sq. inches (9,900 sq. cm.).
Two sets of 14x14-inch, slide-in, Electrodes/Sample shelves for 392 sq. inches (1265 sq.
cm) of sample space. Full PLC control of all operating parameters. As
standard, two different plasma gases. 500 watt RF Power Supply.
The 1000P/LMC is specifically designed for fast, uniform cleaning of lead frames and boat
carrier borne devices loaded into one or two open-sided magazines. The system is of
parallel plate design to provide uniform plasma throughout the magazine.
R4A, Powered by a 2.5 kW supply, the R4A system has capacity
for up to four 24 x 24-inch sample trays.